MSA-100-3D顯微式測(cè)振儀 MSA-100-3D 顯微式激光測(cè)振儀可在大帶寬范圍內(nèi)實(shí)時(shí)測(cè)量樣本的動(dòng)態(tài)特性，高分辨率同時(shí)記錄和分析XYZ三個(gè)方向的振動(dòng)分量，每向的振幅分辨率均達(dá)到亞皮米級(jí)。因激光光斑極小，所以橫向分辨率，且?guī)捀哌_(dá) 25 MHz，是用于微機(jī)電傳感器(MEMS) 以及其他微結(jié)構(gòu)振動(dòng)測(cè)量的理想設(shè)備。通過(guò)軟件移動(dòng)樣品，完成樣品整個(gè)表面的振動(dòng)分析，然后以圖形方式顯示振型。

詳細(xì)介紹

3D Vibration Measurements for Microsystems

Micro System Analyzer is designed for 3D vibration analysis with high lateral resolution. It is especially suited for microsystems, precision mechanics parts and for studies on the dynamics of HGAs and secondary actuators in the data storage industry.

The instrument is based on a novel 3D vibrometer setup enabling pm-resolution for both out-of-plane and in-plane motion. It has a frequency bandwidth of 25 MHz. An integrated XY-traverse stage with full software support for high-precision sample movement enables scanned measurements for obtaining 3D deflection shapes.

The optional integrated XY positioning table together with the sophisticated software enables an easy handling of the probe.

?Real-time measurement with high bandwidth up to 25 MHz
?Sub-pm displacement resolution for both Out-of-Plane and In-Plane motion
?Single-Point and Full-Field scanning measurements
?Small spot size of<4 μm for high lateral resolution
?Large stand-off distance of 38 mm
?Probe station compatible

Principal Configurations	MSA-100-3D Single-Point 3D Vibrometer		MSA-100-3DSV Scanning 3D Vibrometer
Sensor head unit	Microscope optics for best lateral resolution with spot size<4 μm Integrated LED sample illumination
Front-End unit / Data management system	Installed in a system cabinet for 19" electrical equipment: MSA-F-100-3D Vibrometer front end with digital decoder technology MSA-W-100-3D Data Management System
Stａnd (optional)	Rigid stａnd for interfacing the sensor head unit to an optical table or breadboard, incl. focus block with 100 mm travel range for traversing the sensor head unit in the Z axis
Prober compatibility	Compatible to manual, automatic and vacuum probestations
xy Stage	Manual stage (optional)		A-PST-200P XY Precision Positioning Stage: Travel range: 200 mm x 200 mm Tip/tilt adjustment Bi-directional repeatability: +/- 0.5 µm Load capacity: 10 kg
Software	VibSoft-1004 Software Package for data acquisition and analysis		PSV Scanning Vibrometer Software for data acquisition and analysis
Sensor Head Unit
Configuration	Single measurement beam, three direction sensitive detectors
Laser source	DPSS, 532 nm, visible green laser beam
Laser output power	<5 mW visible output power
Laser safety class	Class 2M
Stand-off distance	36,7 mm
Spot diameter	<4 µm
Depth of focus	±10 µm
Weight	12.5 kg
Camera	Two integrated digital cameras for displaying measurement and large overview area MAIN (measurement area): field of view (mm2) = 0.94 x 0.71, resolution (px) = 1,296 x 966 AUX (overview area): field of view (mm2) = 3.7 x 2.7, resolution (px) =782 x 582
Front-End Configurations	MSA-100-3D-H	MSA-100-3D-M		MSA-100-3D-V
fmax	100 kHz	2.5 MHz		25 MHz
Number of ranges	13 velocity ranges	13 velocity ranges		13 velocity ranges
vmax	0.01 m/s … 10 m/s, range dependent	0.001 m/s … 10 m/s, range dependent		0.001 m/s … 10 m/s, range dependent
Velocity resolution, average value	0.01 (µm/s)/√Hz … 0.02 (µm/s)/√Hz range dependent, frequency dependent	0.005 (µm/s)/√Hz … 1 (µm/s)/√Hz range dependent, frequency dependent		0.005 (µm/s)/√Hz …. 2 (µm/s)/√Hz range dependent, frequency dependent
General Specifications
Power consumption	100 VAC ... 240 VAC ±10%, 50/60 Hz; overall max. 825 W
Environmental conditions	Operating temperature: +18 °C ... +28 °C (64.4 °F ... 82.4 °F); Storage temperature: –10 °C ... +65 °C (14 °F ... 149 °F); Relative humidity: max. 80%, non-condensing

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